In 1983, the two journals, Journal of Vacuum Science and Technology A and B were launched when the original Journal of Vacuum Science and Technology was split.JVSTB is devoted to publishing reports of original research, letters, and review articles on microelectronics and nanotechnology. The scope includes, but is not limited to, the following topics:2-D materialsCompound semiconductor electronics and optoelectronicsDielectrics in micro- and nanoelectronicsGraphene, carbon nanotubes, and fullerenes: materials & devicesGroup IV semiconductor microelectronicsLithographyMicroelectromechanical and nanoelectromechanical systems and devices (MEMS & NEMS)Nanometer science and nanotechnologyNanostructured materials and devices including nanowires, nanoparticles and quantum dots, and organic and molecular electronicsPhotovoltaics, batteries, and other devices for energy conversion and storagePlasmonicsSpintronics and magnetic devicesVacuum nanoelectronics

1983年，原《真空科學與技術雜志》拆分后，創辦了《真空科學與技術雜志A》和《真空科學與技術雜志B》。JVSTB致力于發表關于微電子學和納米技術的原創研究報告、信函和評論文章。范圍包括但不限于以下主題:二維材料復合半導體電子學和光電子學微電子和納米電子中的介質石墨烯、碳納米管和富勒烯:材料和器件第四組半導體微電子學光刻技術微機電和納米機電系統及設備(MEMS & NEMS)納米科學和納米技術納米結構材料和器件，包括納米線、納米顆粒和量子點，以及有機和分子電子學光電、電池和其他用于能量轉換和儲存的裝置等離子自旋電子學和磁性器件真空納電子學